apc|m europe

18th European Advanced Process Control and Manufacturing Conference

How real-time data aggregation can be used for KPI calculations and forecasting

Recent research findings on the use of statistical KPI forecasts in semiconductor manufacturing indicates promising potential in the area of manufacturing optimization. Typical use cases could be found in equipment maintenance planning, production control and optimization, and production planning.

Dr. Mike Gißrau and Dr. Gerhard Luhn presented these findings at the European Advanced Process Control and Manufacturing (apc|m) Conference in Dresden in April 2018.
In this abstract you will find:


  • Ways to generate trustworthy KPI forecasts using statistical methods
  • Comparison and combination of linear models, vector-autoregressive models, multivariate adaptive regression, and neural networks for KPI forecasting
  • A brief outlook on the next and planned steps for usage and combination with simulation